Dr
Richard Hurley
Consultant in high vacuum science and technology, thin
films, plasma and ion/electron beam systems.
I have had considerable experience in both industry and
research laboratories of the problems and difficulties that are often encountered
in high vacuum processes and am prepared to advise and spend time as necessary
where an independent opinion is required.
High vacuum technology:
Pumping and choice of pumps, system design, outgassing, vacuum leaks, pressure
measurement, residual gas analysis.
Thin films: System
design, sputtering, evaporation, thickness measurement, film uniformity,
film contamination. Metal, compounds and semiconductors including some
specialised materials like DLC, TiN and selenium/tellurium alloys and associated
crystal defects.
Ion/electron plasma
systems: Sources, operation and stability, contamination, design of beam-lines.
I also give courses on various
aspects of high vacuum both at an elementary level for staff training and
for more advanced specialisms.
Please contact me if you have a problem:
The
Queen's University of Belfast
Northern
Ireland Semiconductor Research Centre
School
of Electrical and Electronic Engineering
Ashby Building,
Belfast BT9 5AH, UK
Telephone: +44
(0)2890 974084
Fax: +44 (0)2890
667023
e-mail:
Graded Vacuum
Courses.
1. Elementary.
For skilled and semi-skilled workers requiring practical working knowledge
of the concepts underlying high vacuum equipment and its applications.
This course introduces basic ideas including units and measurement in a
non-mathematical way, emphasises good working practices and introduces
the basics of system design.
2. Intermediate.
For technical staffs who require sufficient understanding of the concepts
of high vacuum science for system design, maintenance and advanced operation.This
course requires an elementary knowledge of maths and physics but emphasises
practical working and introduces some applications in advanced technology.
3. Advanced
3.1 Research Course.
For final year students, postgraduates, qualified industrial research
staff using advanced equipment and processes requiring both practical and
theoretical knowledge of high vacuum science and technology. Maths and
physics to a good 'A' level standard is necessary.
3.2 Process and Design Course.
For operators, researchers and designers requiring practical working
knowledge of advanced systems. Only mathematics and physics essential for
understanding and working with processes and system design is required.